Sub-picosecond UV laser ablation of metals
Identifieur interne : 000087 ( Main/Exploration ); précédent : 000086; suivant : 000088Sub-picosecond UV laser ablation of metals
Auteurs : RBID : ISTEX:339_1995_Article_BF01538207.pdfEnglish descriptors
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Abstract
Laser ablation of Nickel, Copper, Molybdenum, Indium, Tungsten and Gold by short ultraviolet laser pulses (0.5 ps, 248 nm) in vacuum is reported for the first time. For Nickel and Indium, ablation is also studied in air to demonstrate the influence of the ambient atmosphere. Metal ablation in air is significantly less efficient than in vacuum due to redeposition of ablated material. The ablation rates in vacuum are discussed using a thermal model, which also allows to estimate ablation rates for other metals from basic optical and thermal properties. A comparison of the morphology of ablation sites after nanosecond and sub-picosecond ablation shows unequivocally the advantages of short-pulse laser ablation for high-precision patterning of thermally good conducting materials in micron-scale dimensions.
DOI: 10.1007/BF01538207
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Box 2841, D-37018, Göttingen</wicri:regionArea><placeName><region type="land" nuts="2">Basse-Saxe</region><settlement type="city">Göttingen</settlement></placeName></affiliation></author></titleStmt><publicationStmt><idno type="RBID">ISTEX:339_1995_Article_BF01538207.pdf</idno><date when="1995">1995</date><idno type="doi">10.1007/BF01538207</idno><idno type="wicri:Area/Main/Corpus">000A33</idno><idno type="wicri:Area/Main/Curation">000A33</idno><idno type="wicri:Area/Main/Exploration">000087</idno></publicationStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>81.15</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="eng">Laser ablation of Nickel, Copper, Molybdenum, Indium, Tungsten and Gold by short ultraviolet laser pulses (0.5 ps, 248 nm) in vacuum is reported for the first time. For Nickel and Indium, ablation is also studied in air to demonstrate the influence of the ambient atmosphere. Metal ablation in air is significantly less efficient than in vacuum due to redeposition of ablated material. The ablation rates in vacuum are discussed using a thermal model, which also allows to estimate ablation rates for other metals from basic optical and thermal properties. A comparison of the morphology of ablation sites after nanosecond and sub-picosecond ablation shows unequivocally the advantages of short-pulse laser ablation for high-precision patterning of thermally good conducting materials in micron-scale dimensions.</div></front></TEI><mods xsi:schemaLocation="http://www.loc.gov/mods/v3 file:///applis/istex/home/loadistex/home/etc/xsd/mods.xsd" version="3.4" istexId="b6251ffe0e1db4343a82ab761eb4fe7e4b9fbf99"><titleInfo lang="eng"><title>Sub-picosecond UV laser ablation of metals</title></titleInfo><name type="personal"><namePart type="given">S.</namePart><namePart type="family">Preuss</namePart><role><roleTerm type="text">author</roleTerm></role><affiliation>Max-Planck-Institut für biophysikalische Chemie, P.O. Box 2841, D-37018, Göttingen, Germany</affiliation></name><name type="personal"><namePart type="given">A.</namePart><namePart type="family">Demchuk</namePart><role><roleTerm type="text">author</roleTerm></role><affiliation>Max-Planck-Institut für biophysikalische Chemie, P.O. Box 2841, D-37018, Göttingen, Germany</affiliation></name><name type="personal"><namePart type="given">M.</namePart><namePart type="family">Stuke</namePart><role><roleTerm type="text">author</roleTerm></role><description>MSTUKE@gwdg.de</description><affiliation>Max-Planck-Institut für biophysikalische Chemie, P.O. Box 2841, D-37018, Göttingen, Germany</affiliation></name><typeOfResource>text</typeOfResource><genre>Original Paper</genre><originInfo><publisher>Springer-Verlag, Berlin/Heidelberg</publisher><dateCreated encoding="w3cdtf">1995-01-12</dateCreated><dateCaptured encoding="w3cdtf">1995-02-03</dateCaptured><dateValid encoding="w3cdtf">2005-04-06</dateValid><copyrightDate encoding="w3cdtf">1995</copyrightDate></originInfo><language><languageTerm type="code" authority="iso639-2b">eng</languageTerm></language><physicalDescription><internetMediaType>text/html</internetMediaType></physicalDescription><abstract lang="eng">Laser ablation of Nickel, Copper, Molybdenum, Indium, Tungsten and Gold by short ultraviolet laser pulses (0.5 ps, 248 nm) in vacuum is reported for the first time. For Nickel and Indium, ablation is also studied in air to demonstrate the influence of the ambient atmosphere. Metal ablation in air is significantly less efficient than in vacuum due to redeposition of ablated material. The ablation rates in vacuum are discussed using a thermal model, which also allows to estimate ablation rates for other metals from basic optical and thermal properties. A comparison of the morphology of ablation sites after nanosecond and sub-picosecond ablation shows unequivocally the advantages of short-pulse laser ablation for high-precision patterning of thermally good conducting materials in micron-scale dimensions.</abstract><subject lang="eng"><genre>PACS</genre><topic>81.15</topic></subject><relatedItem type="series"><titleInfo type="abbreviated"><title>Appl. Phys. A</title></titleInfo><titleInfo><title>Applied Physics A</title><subTitle>Materials Science and Processing</subTitle><partNumber>Year: 1995</partNumber><partNumber>Volume: 61</partNumber><partNumber>Number: 1</partNumber></titleInfo><genre>Archive Journal</genre><originInfo><dateIssued encoding="w3cdtf">1995-07-01</dateIssued><copyrightDate encoding="w3cdtf">1995</copyrightDate></originInfo><subject usage="primary"><topic>Physics</topic><topic>Optical and Electronic Materials</topic><topic>Nanotechnology</topic><topic>Characterization and Evaluation Materials</topic><topic>Surfaces and Interfaces, Thin Films</topic><topic>Condensed Matter</topic><topic>Operating Procedures, Materials Treatment</topic></subject><identifier type="issn">0947-8396</identifier><identifier type="issn">Electronic: 1432-0630</identifier><identifier type="matrixNumber">339</identifier><identifier type="local">IssueArticleCount: 19</identifier><recordInfo><recordOrigin>Springer-Verlag, 1995</recordOrigin></recordInfo></relatedItem><identifier type="doi">10.1007/BF01538207</identifier><identifier type="matrixNumber">Art6</identifier><identifier type="local">BF01538207</identifier><accessCondition type="use and reproduction">MetadataGrant: OpenAccess</accessCondition><accessCondition type="use and reproduction">AbstractGrant: OpenAccess</accessCondition><accessCondition type="restriction on access">BodyPDFGrant: Restricted</accessCondition><accessCondition type="restriction on access">BodyHTMLGrant: Restricted</accessCondition><accessCondition type="restriction on access">BibliographyGrant: Restricted</accessCondition><accessCondition type="restriction on access">ESMGrant: Restricted</accessCondition><part><extent unit="pages"><start>33</start><end>37</end></extent></part><recordInfo><recordOrigin>Springer-Verlag, 1995</recordOrigin><recordIdentifier>339_1995_Article_BF01538207.pdf</recordIdentifier></recordInfo></mods></record>Pour manipuler ce document sous Unix (Dilib)
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